Indicative specifications

• Thickness  (+/- 5%)
• Width
• Aspect ratio

Cylinder profile

• Thickness (+/- 5%)
• Width dry resist     
  Width wet resist
• Aspect ratio

5 - 100 µm
≥ 10 µm
≥ 1,5 µm
up to 3

200 µm


up to 5

Two-step profile

• Thickness (+/- 5%) 1st layer
  Thickness (+/- 5%) 2nd layer    
• Width of 1st layer: dry resist
  Width of 1st layer: wet resist
• Aspect ratio per layer

1 - 100 µm
5 - 100 µm
≥ 10 µm
≥ 1 µm
up to 3

200 µm



up to 5