Indicative specifications

Dimensions

  • Glass carrier:   up to 500 x 600 mm
  • Wafer carrier: up to 200 mm diameter

Profiles

Trumpet Cylinder Two-stage

 

  Standard On consultation    
Trumpet profile
  • Thickness  (+/- 5%)
  • Width
  • Aspect ratio

5 - 100 µm    
≥ 1 µm
up to 10
200 µm
0,5 µm

 

Cylinder profile

  • Thickness (+/- 5%)
  • Width dry resist     
    Width wet resist
  • Aspect ratio

 

 

5 - 100 µm
≥ 10 µm
≥ 1,5 µm
up to 3

 

 

200 µm


up to 5

 

Two-step profile

  • Thickness (+/- 5%) 1st layer
    Thickness (+/- 5%) 2nd layer    
  • Width of 1st layer: dry resist
    Width of 1st layer: wet resist
  • Aspect ratio per layer

 

 

1 - 100 µm
5 - 100 µm
≥ 10 µm
≥ 1 µm
up to 3

 

 

200 µm



up to 5



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